From nharjee at snf.stanford.edu Mon May 7 11:02:55 2007 From: nharjee at snf.stanford.edu (nharjee at snf.stanford.edu) Date: Mon, 7 May 2007 11:02:55 -0700 Subject: Problem stsetch SNF 2007-05-07 11:02:55: Backside He not maintained with carrier Message-ID: Tried many wafers with the wafer carrier and none of them were able to maintain backside He. Tried same wafers without carrier and there is no problem. One suggestion was that I should have done EBR on the resist on the backside of the wafer. However, I even tried a freshly-cleaned wafer in the carrier and it cannot maintain backside He either. This is high priority as it is needed for the E341 class this week. Thanks. From eenriquez at snf.stanford.edu Wed May 9 07:16:00 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 9 May 2007 07:16:00 -0700 Subject: Problem stsetch SNF 2007-05-07 11:02:55: Backside He not maintained with carrier Message-ID: Lowered the backside He pressure to 7. From kwankyu at snf.stanford.edu Thu May 10 19:11:30 2007 From: kwankyu at snf.stanford.edu (kwankyu at snf.stanford.edu) Date: Thu, 10 May 2007 19:11:30 -0700 Subject: Problem stsetch SNF 2007-05-10 19:11:29: wafer broke in chamber Message-ID: From eenriquez at snf.stanford.edu Fri May 11 09:42:42 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 May 2007 09:42:42 -0700 Subject: Problem stsetch SNF 2007-05-10 19:11:29: wafer broke in chamber Message-ID: Removed broken wafer and cleaned the chamber. Ran O2 plasma. From praveen at snf.stanford.edu Sat May 19 09:08:11 2007 From: praveen at snf.stanford.edu (praveen at snf.stanford.edu) Date: Sat, 19 May 2007 09:08:11 -0700 Subject: Problem stsetch SNF 2007-05-19 09:08:11: system in unknown state Message-ID: From praveen at snf.stanford.edu Sun May 20 09:24:49 2007 From: praveen at snf.stanford.edu (praveen at snf.stanford.edu) Date: Sun, 20 May 2007 09:24:49 -0700 Subject: Problem stsetch SNF 2007-05-20 09:24:48: c4f8 flow out of tolerance error Message-ID: Ran the recipe DEEP for 15 minutes when the above error occured. Also noticed that C4F8 does not flow more than 20sccm (set value is 85sccm) From praveen at snf.stanford.edu Sun May 20 09:28:36 2007 From: praveen at snf.stanford.edu (praveen at snf.stanford.edu) Date: Sun, 20 May 2007 09:28:36 -0700 Subject: Shutdown stsetch SNF 2007-05-20 09:28:36: c4f8 flow out of tolerance error Message-ID: From rissman at snf.stanford.edu Sun May 20 21:07:09 2007 From: rissman at snf.stanford.edu (rissman at snf.stanford.edu) Date: Sun, 20 May 2007 21:07:09 -0700 Subject: Shutdown stsetch SNF 2007-05-20 09:28:36: c4f8 flow out of tolerance error Message-ID: According to EricP, this should not effect the use of this tool with SF6, please consider it down for C4F8 until addressed in the morning. From eenriquez at snf.stanford.edu Mon May 21 08:47:04 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 21 May 2007 08:47:04 -0700 Subject: Problem stsetch SNF 2007-05-20 09:24:48: c4f8 flow out of tolerance error Message-ID: Found the Freon 318 regulator had been turned down. Adjusted regulator and ran DEEP recipe for 5 minutes with no problems. From eenriquez at snf.stanford.edu Mon May 21 08:47:14 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 21 May 2007 08:47:14 -0700 Subject: Problem stsetch SNF 2007-05-19 09:08:11: system in unknown state Message-ID: Found the Freon 318 regulator had been turned down. Adjusted regulator and ran DEEP recipe for 5 minutes with no problems. From praveen at snf.stanford.edu Mon May 21 10:09:07 2007 From: praveen at snf.stanford.edu (praveen at snf.stanford.edu) Date: Mon, 21 May 2007 10:09:07 -0700 Subject: Problem stsetch SNF 2007-05-21 10:09:06: C4F8 flow out of tolerance error again Message-ID: Only this time, I am not able to unload wafer. Says "interlock tripped" Wafer still in the etch chamber inside aluminum plate From praveen at snf.stanford.edu Mon May 21 10:59:13 2007 From: praveen at snf.stanford.edu (praveen at snf.stanford.edu) Date: Mon, 21 May 2007 10:59:13 -0700 Subject: Comment stsetch SNF 2007-05-21 10:59:12: c4f8 flow out of tolerance and interlock trip error every few minutes of etching Message-ID: Was able to unload my wafer From eenriquez at snf.stanford.edu Mon May 21 14:28:04 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 21 May 2007 14:28:04 -0700 Subject: Problem stsetch SNF 2007-05-21 14:28:04: C4F8 flow is unstable Message-ID: Possible bad C4F8 MFC. Need to verify. From eenriquez at snf.stanford.edu Tue May 22 14:05:18 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 22 May 2007 14:05:18 -0700 Subject: Problem stsetch SNF 2007-05-21 14:28:04: C4F8 flow is unstable Message-ID: Replaced C4F8 MFC. Ran Deep process for 10 minutes with no problems. C4F8 flow is stable. From eenriquez at snf.stanford.edu Tue May 22 14:05:29 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 22 May 2007 14:05:29 -0700 Subject: Comment stsetch SNF 2007-05-21 10:59:12: c4f8 flow out of tolerance and interlock trip error every few minutes of etching Message-ID: Replaced C4F8 MFC. Ran Deep process for 10 minutes with no problems. C4F8 flow is stable. From eenriquez at snf.stanford.edu Tue May 22 14:05:40 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 22 May 2007 14:05:40 -0700 Subject: Problem stsetch SNF 2007-05-21 10:09:06: C4F8 flow out of tolerance error again Message-ID: Replaced C4F8 MFC. Ran Deep process for 10 minutes with no problems. C4F8 flow is stable. From eenriquez at snf.stanford.edu Tue May 22 14:10:12 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 22 May 2007 14:10:12 -0700 Subject: Problem stsetch SNF 2007-05-22 14:10:12: Need to verify passivation dep rate Message-ID: Replaced C4F8 MFC, need to verify passivation dep rate. From latta at snf.stanford.edu Tue May 22 16:04:09 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 22 May 2007 16:04:09 -0700 Subject: Comment stsetch SNF 2007-02-23 12:06:00: Etch results Message-ID: SOI swtich in wrong position... From latta at snf.stanford.edu Tue May 22 16:05:41 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 22 May 2007 16:05:41 -0700 Subject: Problem stsetch SNF 2007-05-22 14:10:12: Need to verify passivation dep rate Message-ID: Ran process qual- etch rate = 2.9u/min (higher than usual)and PR etch rate = 216A/min (lower than usual) Tool is up. From mislam at snf.stanford.edu Wed May 23 18:04:02 2007 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Wed, 23 May 2007 18:04:02 -0700 Subject: Problem stsetch SNF 2007-05-23 18:04:02: C4F8 out of tolerance error Message-ID: Error keeps coming up every few minutes, C4F8 flow varies. From eenriquez at snf.stanford.edu Wed May 23 18:52:37 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 May 2007 18:52:37 -0700 Subject: Problem stsetch SNF 2007-05-23 18:04:02: C4F8 out of tolerance error Message-ID: Reduced gas pressure from 25 psi to ~ 12 psi. User ran for over 30 min with no problems.