Problem stsetch SNF 2007-05-20 09:24:48: c4f8 flow out of tolerance error

praveen at snf.stanford.edu praveen at snf.stanford.edu
Sun May 20 09:24:49 PDT 2007


Ran the recipe DEEP for 15 minutes when the above error occured. Also noticed that C4F8 does not flow more than 20sccm (set value is 85sccm)




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