Problem stsetch SNF 2007-05-20 09:24:48: c4f8 flow out of tolerance error
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Mon May 21 08:47:04 PDT 2007
Found the Freon 318 regulator had been turned down. Adjusted regulator and ran DEEP recipe for 5 minutes with no problems.
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