Problem stsetch SNF 2007-05-20 09:24:48: c4f8 flow out of tolerance error

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon May 21 08:47:04 PDT 2007


Found the Freon 318 regulator had been turned down.  Adjusted regulator and ran DEEP recipe for 5 minutes with no problems.




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