Problem stsetch SNF 2007-05-21 10:09:06: C4F8 flow out of tolerance error again

praveen at snf.stanford.edu praveen at snf.stanford.edu
Mon May 21 10:09:07 PDT 2007

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Only this time, I am not able to unload wafer. Says "interlock tripped" Wafer still in the etch chamber inside aluminum plate

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