Problem stsetch SNF 2007-05-21 14:28:04: C4F8 flow is unstable
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Mon May 21 14:28:04 PDT 2007
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Comment stsetch SNF 2007-05-21 10:59:12: c4f8 flow out of tolerance and interlock trip error every few minutes of etching
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Problem stsetch SNF 2007-05-21 14:28:04: C4F8 flow is unstable
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Possible bad C4F8 MFC. Need to verify.
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Comment stsetch SNF 2007-05-21 10:59:12: c4f8 flow out of tolerance and interlock trip error every few minutes of etching
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Problem stsetch SNF 2007-05-21 14:28:04: C4F8 flow is unstable
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