Comment stsetch SNF 2007-05-21 10:59:12: c4f8 flow out of tolerance and interlock trip error every few minutes of etching

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue May 22 14:05:29 PDT 2007


Replaced C4F8 MFC.  Ran Deep process for 10 minutes with no problems.  C4F8 flow is stable.




More information about the stsetch-pcs mailing list