Problem stsetch SNF 2007-05-21 10:09:06: C4F8 flow out of tolerance error again

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue May 22 14:05:40 PDT 2007

Previous message: Problem stsetch SNF 2007-05-21 10:09:06: C4F8 flow out of tolerance error again
Next message: Comment stsetch SNF 2007-05-21 10:59:12: c4f8 flow out of tolerance and interlock trip error every few minutes of etching
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Replaced C4F8 MFC.  Ran Deep process for 10 minutes with no problems.  C4F8 flow is stable.

Previous message: Problem stsetch SNF 2007-05-21 10:09:06: C4F8 flow out of tolerance error again
Next message: Comment stsetch SNF 2007-05-21 10:59:12: c4f8 flow out of tolerance and interlock trip error every few minutes of etching
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the stsetch-pcs mailing list