Problem stsetch SNF 2007-05-22 14:10:12: Need to verify passivation dep rate

latta at snf.stanford.edu latta at snf.stanford.edu
Tue May 22 16:05:41 PDT 2007


Ran process qual- etch rate = 2.9u/min (higher than usual)and PR etch rate = 216A/min (lower than usual)
Tool is up.




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