May 2007 Archives by subject

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Starting: Mon May 7 11:02:55 PDT 2007
Ending: Wed May 23 18:52:37 PDT 2007
Messages: 21

• Comment stsetch SNF 2007-02-23 12:06:00: Etch results   latta at snf.stanford.edu
• Comment stsetch SNF 2007-05-21 10:59:12: c4f8 flow out of tolerance and interlock trip error every few minutes of etching   praveen at snf.stanford.edu
• Comment stsetch SNF 2007-05-21 10:59:12: c4f8 flow out of tolerance and interlock trip error every few minutes of etching   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2007-05-07 11:02:55: Backside He not maintained with carrier   nharjee at snf.stanford.edu
• Problem stsetch SNF 2007-05-07 11:02:55: Backside He not maintained with carrier   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2007-05-10 19:11:29: wafer broke in chamber   kwankyu at snf.stanford.edu
• Problem stsetch SNF 2007-05-10 19:11:29: wafer broke in chamber   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2007-05-19 09:08:11: system in unknown state   praveen at snf.stanford.edu
• Problem stsetch SNF 2007-05-19 09:08:11: system in unknown state   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2007-05-20 09:24:48: c4f8 flow out of tolerance error   praveen at snf.stanford.edu
• Problem stsetch SNF 2007-05-20 09:24:48: c4f8 flow out of tolerance error   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2007-05-21 10:09:06: C4F8 flow out of tolerance error again   praveen at snf.stanford.edu
• Problem stsetch SNF 2007-05-21 10:09:06: C4F8 flow out of tolerance error again   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2007-05-21 14:28:04: C4F8 flow is unstable   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2007-05-21 14:28:04: C4F8 flow is unstable   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2007-05-22 14:10:12: Need to verify passivation dep rate   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2007-05-22 14:10:12: Need to verify passivation dep rate   latta at snf.stanford.edu
• Problem stsetch SNF 2007-05-23 18:04:02: C4F8 out of tolerance error   mislam at snf.stanford.edu
• Problem stsetch SNF 2007-05-23 18:04:02: C4F8 out of tolerance error   eenriquez at snf.stanford.edu
• Shutdown stsetch SNF 2007-05-20 09:28:36: c4f8 flow out of tolerance error   praveen at snf.stanford.edu
• Shutdown stsetch SNF 2007-05-20 09:28:36: c4f8 flow out of tolerance error   rissman at snf.stanford.edu

Last message date: Wed May 23 18:52:37 PDT 2007
Archived on: Fri Jan 11 13:11:18 PST 2013

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