From latta at snf.stanford.edu  Thu Nov  1 10:44:10 2007
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Thu, 1 Nov 2007 10:44:10 -0700
Subject: Comment stsetch SNF 2007-11-01 10:44:09: Whole carrier wafer in chamber
Message-ID: <mailman.1442.1357938653.25867.stsetch-pcs@snf.stanford.edu>

Last night a resist bonded wafer separeted from the backing wafer as awhole wafer and is still in the chamber.  It does not affect the operation of the tool.



From axiu at snf.stanford.edu  Mon Nov 26 07:36:29 2007
From: axiu at snf.stanford.edu (axiu at snf.stanford.edu)
Date: Mon, 26 Nov 2007 07:36:29 -0800
Subject: Problem stsetch SNF 2007-11-26 07:36:28: no interface to load recipe
Message-ID: <mailman.1443.1357938653.25867.stsetch-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Mon Nov 26 12:19:45 2007
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 26 Nov 2007 12:19:45 -0800
Subject: Problem stsetch SNF 2007-11-26 07:36:28: no interface to load recipe
Message-ID: <mailman.1444.1357938653.25867.stsetch-pcs@snf.stanford.edu>

Computer lost communication with the system. Reset the computer.