Comment stsetch SNF 2007-11-01 10:44:09: Whole carrier wafer in chamber

latta at snf.stanford.edu latta at snf.stanford.edu
Thu Nov 1 10:44:10 PDT 2007


Last night a resist bonded wafer separeted from the backing wafer as awhole wafer and is still in the chamber.  It does not affect the operation of the tool.




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