From mislam at snf.stanford.edu Mon Oct 1 22:04:20 2007 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Mon, 1 Oct 2007 22:04:20 -0700 Subject: Shutdown stsetch SNF 2007-10-01 22:04:19: broken wafer in chamber Message-ID: From eenriquez at snf.stanford.edu Wed Oct 3 09:37:32 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 3 Oct 2007 09:37:32 -0700 Subject: Shutdown stsetch SNF 2007-10-01 22:04:19: broken wafer in chamber Message-ID: Cleaned the chamber. Placed the users wafer on the system computer. Cycled wafer and ran O2 clean. From xzhuan1 at snf.stanford.edu Fri Oct 5 17:47:04 2007 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Fri, 5 Oct 2007 17:47:04 -0700 Subject: Problem stsetch SNF 2007-10-05 17:47:04: Couldn't pump down the load chamber Message-ID: mislam's wafer is still in the process chamber. From shott at snf.stanford.edu Sat Oct 6 02:02:48 2007 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 6 Oct 2007 02:02:48 -0700 Subject: Problem stsetch SNF 2007-10-06 02:02:47: Fomblin oil leak on basement floor ... Message-ID: This evening while I was checking out the electircal burning smell on stsetch2, I was in the basement ot make sure that there was no problem down there. At that time, I notice that there is a puddle of what I believe to be fomblin oil on the floor underneath the stsetch pumps. There seems to be a filter canister in a white, rectangular tub that had tipped over .... although I have no idea whether that is related to this or not. Although I didn't try to clean this up, I did put down one of the yellow rectangular pads to begin to absorb this. Of course, please exercise caution while cleaning this up as it is slippery.Thanks, John From ericp at snf.stanford.edu Sat Oct 6 18:29:51 2007 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sat, 6 Oct 2007 18:29:51 -0700 Subject: Problem stsetch SNF 2007-10-06 18:29:50: Burning smell (stsetch, or stsetch2?) Message-ID: I read the note from John about STSETCH2, but then went to use stsetch#1. I noticed the following: 1). The loadlock window was hazy. 2). On opening, it smells like burned pump oil 3). I found small droplets of (condensed) pump oil. Maybe this was the smell that was observed and attributed to sstsetch2 ? From shott at snf.stanford.edu Sun Oct 7 09:43:29 2007 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sun, 7 Oct 2007 09:43:29 -0700 Subject: Shutdown stsetch SNF 2007-10-07 09:43:29: Shudwown because of burned oil smell in loadlock ... Message-ID: Based on Eric's report and his not on the loadlock to not open the loadlock chamber because of the strong pump oil smell, it seems as if it is more prudent to shut this equipment down so that nobody will use it. The fact that xzhuan1 reported on Friday evening that he couldn't pump the system, followed by my observation of the pump oil leak at 2 a.m. on Saturday morning followed by Eric's observation that the loadlock chanber smelled like burned pump oil all seem to point to a serious pump problem on this system. Thanks, John From eenriquez at snf.stanford.edu Mon Oct 8 15:13:10 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Oct 2007 15:13:10 -0700 Subject: Comment stsetch SNF 2007-10-08 15:13:09: Burning smell update Message-ID: Smell came from the loadlock pump. Replaced the pump and wiped down the loadlock. Was unable to pumpdown the load lock because of a huge leak. Will troubleshoot further tomorrow. From mtang at snf.stanford.edu Mon Oct 8 15:39:13 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 8 Oct 2007 15:39:13 -0700 Subject: Problem stsetch SNF 2007-10-08 15:39:13: SF6 unavailable. Message-ID: From eenriquez at snf.stanford.edu Tue Oct 9 14:46:58 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 9 Oct 2007 14:46:58 -0700 Subject: Comment stsetch SNF 2007-10-09 14:46:57: Update Message-ID: Now able to pump down the loadlock. Cycled 2 wafers with no problems. Placed wafer that was stranded in the chamber in the user's box (slot 5). Ran O2 plasma. SF6 is still unavailable. Possible leaky shut-offf valve. Will troubleshoot further tomorrow. From eenriquez at snf.stanford.edu Wed Oct 10 11:41:48 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 10 Oct 2007 11:41:48 -0700 Subject: Problem stsetch SNF 2007-10-08 15:39:13: SF6 unavailable. Message-ID: SF6 gas reservoir had a loose KF50 clamp. Replaced the o-ring and retightened the clamp. Ran the Deep recipe for 30 minutes. From eenriquez at snf.stanford.edu Wed Oct 10 11:42:38 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 10 Oct 2007 11:42:38 -0700 Subject: Comment stsetch SNF 2007-10-09 14:46:57: Update Message-ID: SF6 gas reservoir had a loose clamp. Replaced the o-ring and retightened clamp. From eenriquez at snf.stanford.edu Wed Oct 10 11:45:28 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 10 Oct 2007 11:45:28 -0700 Subject: Comment stsetch SNF 2007-10-08 15:13:09: Burning smell update Message-ID: Replaced the loadlock pump and degreased the loadlock with acetone and ipa. Still have a slight burnt oil smell. Repaired SF6 leak. Ran O2 plasma for 30 minutes and ran Deep for about 30 minutes. Cycled wafer though the system without any problems. From eenriquez at snf.stanford.edu Wed Oct 10 11:45:36 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 10 Oct 2007 11:45:36 -0700 Subject: Shutdown stsetch SNF 2007-10-07 09:43:29: Shudwown because of burned oil smell in loadlock ... Message-ID: Replaced the loadlock pump and degreased the loadlock with acetone and ipa. Still have a slight burnt oil smell. Repaired SF6 leak. Ran O2 plasma for 30 minutes and ran Deep for about 30 minutes. Cycled wafer though the system without any problems. From eenriquez at snf.stanford.edu Wed Oct 10 11:45:46 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 10 Oct 2007 11:45:46 -0700 Subject: Problem stsetch SNF 2007-10-06 18:29:50: Burning smell (stsetch, or stsetch2?) Message-ID: Replaced the loadlock pump and degreased the loadlock with acetone and ipa. Still have a slight burnt oil smell. Repaired SF6 leak. Ran O2 plasma for 30 minutes and ran Deep for about 30 minutes. Cycled wafer though the system without any problems. From eenriquez at snf.stanford.edu Wed Oct 10 11:46:00 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 10 Oct 2007 11:46:00 -0700 Subject: Problem stsetch SNF 2007-10-06 02:02:47: Fomblin oil leak on basement floor ... Message-ID: Replaced the loadlock pump and degreased the loadlock with acetone and ipa. Still have a slight burnt oil smell. Repaired SF6 leak. Ran O2 plasma for 30 minutes and ran Deep for about 30 minutes. Cycled wafer though the system without any problems. From eenriquez at snf.stanford.edu Wed Oct 10 11:46:13 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 10 Oct 2007 11:46:13 -0700 Subject: Problem stsetch SNF 2007-10-05 17:47:04: Couldn't pump down the load chamber Message-ID: Replaced the loadlock pump and degreased the loadlock with acetone and ipa. Still have a slight burnt oil smell. Repaired SF6 leak. Ran O2 plasma for 30 minutes and ran Deep for about 30 minutes. Cycled wafer though the system without any problems. From eenriquez at snf.stanford.edu Wed Oct 10 13:06:28 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 10 Oct 2007 13:06:28 -0700 Subject: Problem stsetch SNF 2007-10-10 13:06:28: Need to run process qual Message-ID: From latta at snf.stanford.edu Wed Oct 10 14:51:17 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 10 Oct 2007 14:51:17 -0700 Subject: Problem stsetch SNF 2007-10-10 13:06:28: Need to run process qual Message-ID: quals run- look about right..... see comments From latta at snf.stanford.edu Wed Oct 10 14:53:13 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 10 Oct 2007 14:53:13 -0700 Subject: Comment stsetch SNF 2007-10-10 14:53:12: Process qual after SF6 & loadlock fix Message-ID: DEEP program 00:10:00 Si etch rate=2.4um/min PR etch rate = 230A/min From jasmine at snf.stanford.edu Tue Oct 16 20:33:11 2007 From: jasmine at snf.stanford.edu (jasmine at snf.stanford.edu) Date: Tue, 16 Oct 2007 20:33:11 -0700 Subject: Problem stsetch SNF 2007-10-16 20:33:10: need new o ring for wafer holder Message-ID: From eenriquez at snf.stanford.edu Wed Oct 17 08:34:34 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 17 Oct 2007 08:34:34 -0700 Subject: Problem stsetch SNF 2007-10-16 20:33:10: need new o ring for wafer holder Message-ID: Replaced o-ring From latta at snf.stanford.edu Tue Oct 30 15:22:25 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 30 Oct 2007 15:22:25 -0700 Subject: Comment stsetch SNF 2007-10-30 15:22:24: noticed pink plasma.... Message-ID: as the gases switched from SF6 to C4F8. It is a momentary flash of pink. Etch rate seemed about right.... From bchui at snf.stanford.edu Tue Oct 30 21:23:07 2007 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Tue, 30 Oct 2007 21:23:07 -0700 Subject: Problem stsetch SNF 2007-10-30 21:23:07: Wafer broken inside chamber Message-ID: I observed that a wafer had broken inside the etch chamber despite being bonded to a backing wafer. I tried unloading it. Most of it came out but pieces still remain inside the etch chamber. From cbaxter at snf.stanford.edu Wed Oct 31 13:57:06 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 31 Oct 2007 13:57:06 -0700 Subject: Problem stsetch SNF 2007-10-30 21:23:07: Wafer broken inside chamber Message-ID: Vented chamber and removed small pieces of wafer chips.