Shutdown stsetch SNF 2007-10-01 22:04:19: broken wafer in chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Oct 3 09:37:32 PDT 2007


Cleaned the chamber.  Placed the users wafer on the system computer.  Cycled wafer and ran O2 clean.




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