Comment stsetch SNF 2007-10-09 14:46:57: Update

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Oct 9 14:46:58 PDT 2007


Now able to pump down the loadlock.  Cycled 2 wafers with no problems.  Placed wafer that was stranded in the chamber in the user's box (slot 5).  Ran O2 plasma.  SF6 is still unavailable.  Possible leaky shut-offf valve.  Will troubleshoot further tomorrow.




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