Problem stsetch SNF 2007-10-05 17:47:04: Couldn't pump down the load chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Oct 10 11:46:13 PDT 2007


Replaced the loadlock pump and degreased the loadlock with acetone and ipa.  Still have a slight burnt oil smell.  Repaired SF6 leak.  Ran O2 plasma for 30 minutes and ran Deep for about 30 minutes.  Cycled wafer though the system without any problems.




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