Comment stsetch SNF 2007-10-10 14:53:12: Process qual after SF6 & loadlock fix

latta at snf.stanford.edu latta at snf.stanford.edu
Wed Oct 10 14:53:13 PDT 2007


DEEP program  00:10:00
Si etch rate=2.4um/min
PR etch rate = 230A/min




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