Problem stsetch SNF 2007-10-30 21:23:07: Wafer broken inside chamber

bchui at snf.stanford.edu bchui at snf.stanford.edu
Tue Oct 30 21:23:07 PDT 2007


I observed that a wafer had broken inside the etch chamber
 despite being bonded to a backing wafer.  I tried unloading it.  Most of it came out but pieces still remain inside the etch chamber.




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