October 2007 Archives by author

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Starting: Mon Oct 1 22:04:20 PDT 2007
Ending: Wed Oct 31 13:57:06 PDT 2007
Messages: 24

• Problem stsetch SNF 2007-10-30 21:23:07: Wafer broken inside chamber   bchui at snf.stanford.edu
• Problem stsetch SNF 2007-10-30 21:23:07: Wafer broken inside chamber   cbaxter at snf.stanford.edu
• Shutdown stsetch SNF 2007-10-01 22:04:19: broken wafer in chamber   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2007-10-08 15:13:09: Burning smell update   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2007-10-09 14:46:57: Update   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2007-10-08 15:39:13: SF6 unavailable.   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2007-10-09 14:46:57: Update   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2007-10-08 15:13:09: Burning smell update   eenriquez at snf.stanford.edu
• Shutdown stsetch SNF 2007-10-07 09:43:29: Shudwown because of burned oil smell in loadlock ...   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2007-10-06 18:29:50: Burning smell (stsetch, or stsetch2?)   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2007-10-06 02:02:47: Fomblin oil leak on basement floor ...   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2007-10-05 17:47:04: Couldn't pump down the load chamber   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2007-10-10 13:06:28: Need to run process qual   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2007-10-16 20:33:10: need new o ring for wafer holder   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2007-10-06 18:29:50: Burning smell (stsetch, or stsetch2?)   ericp at snf.stanford.edu
• Problem stsetch SNF 2007-10-16 20:33:10: need new o ring for wafer holder   jasmine at snf.stanford.edu
• Problem stsetch SNF 2007-10-10 13:06:28: Need to run process qual   latta at snf.stanford.edu
• Comment stsetch SNF 2007-10-10 14:53:12: Process qual after SF6 & loadlock fix   latta at snf.stanford.edu
• Comment stsetch SNF 2007-10-30 15:22:24: noticed pink plasma....   latta at snf.stanford.edu
• Shutdown stsetch SNF 2007-10-01 22:04:19: broken wafer in chamber   mislam at snf.stanford.edu
• Problem stsetch SNF 2007-10-08 15:39:13: SF6 unavailable.   mtang at snf.stanford.edu
• Problem stsetch SNF 2007-10-06 02:02:47: Fomblin oil leak on basement floor ...   shott at snf.stanford.edu
• Shutdown stsetch SNF 2007-10-07 09:43:29: Shudwown because of burned oil smell in loadlock ...   shott at snf.stanford.edu
• Problem stsetch SNF 2007-10-05 17:47:04: Couldn't pump down the load chamber   xzhuan1 at snf.stanford.edu

Last message date: Wed Oct 31 13:57:06 PDT 2007
Archived on: Fri Jan 11 13:11:18 PST 2013

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