Comment stsetch SNF 2008-04-07 16:52:35: PR burned and holder/wafer very hot

tomada at snf.stanford.edu tomada at snf.stanford.edu
Mon Apr 7 16:52:36 PDT 2008


maybe a cooling problem? The machine did not complain during the run. Flow looked good. The hoder got very hot with a ~6 minutes run.




More information about the stsetch-pcs mailing list