Problem stsetch SNF 2008-04-08 22:35:06: Load lock will not vent...

jackson at snf.stanford.edu jackson at snf.stanford.edu
Tue Apr 8 22:35:06 PDT 2008


My wafer is still in the load lock, "pump time out" and will not vent .          When the lock lock gets vented, please place my wafer in the single wafer pack and place gently in the roll a round for me ..(I will pick up 4/9)   thanks   Kathy
PS>   yesterday one of the wafer holder clamps footing came off on my wafer .  (clamps inside chamber)




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