Comment stsetch SNF 2008-04-08 23:03:01: press "accept" and "vent" several times

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Apr 9 09:40:08 PDT 2008


Added oil to the loadlock pump.  Cycled wafer in and out of the chamber several times with no problems.




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