Problem stsetch SNF 2008-04-10 22:44:49: Wafer finger tip

ericp at snf.stanford.edu ericp at snf.stanford.edu
Thu Apr 10 22:44:49 PDT 2008


This problem reported the other day was not resolved: 
  yesterday one of the wafer holder clamps footing came off on my wafer .  (clamps inside chamber)




More information about the stsetch-pcs mailing list