From gzxqfy at 163.com Sun Aug 3 07:36:09 2008 From: gzxqfy at 163.com (=?GB2312?B?0MLHxdGnyvW3rdLru/q5uQ==?=) Date: Sun, 3 Aug 2008 22:36:09 +0800 Subject: =?GB2312?B?0MLHxdGnyvW3rdLru/q5uQ==?= Message-ID: An HTML attachment was scrubbed... URL: From jwpchen at snf.stanford.edu Sat Aug 9 18:28:38 2008 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Sat, 9 Aug 2008 18:28:38 -0700 Subject: Problem stsetch SNF 2008-08-09 18:28:37: comm error Message-ID: arrived at machine to find: operator station shut down - communications timeout after click OK the software shuts down and drops to windoze desktop From eenriquez at snf.stanford.edu Mon Aug 11 11:30:57 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 11 Aug 2008 11:30:57 -0700 Subject: Problem stsetch SNF 2008-08-09 18:28:37: comm error Message-ID: Reset the system. From eenriquez at snf.stanford.edu Tue Aug 12 08:38:29 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 12 Aug 2008 08:38:29 -0700 Subject: Shutdown stsetch SNF 2008-08-12 08:38:27: Chamber door oring leaks Message-ID: Replacing o-ring From eenriquez at snf.stanford.edu Tue Aug 12 10:43:31 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 12 Aug 2008 10:43:31 -0700 Subject: Shutdown stsetch SNF 2008-08-12 08:38:27: Chamber door oring leaks Message-ID: Ordered a new isolation valve door. Part will be in by Thursday. Should be OK to run since the load lock is under vacuum during process. Nancy will change the SOP so that the load lock is pumped down when the system idle. From eenriquez at snf.stanford.edu Tue Aug 12 10:46:26 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 12 Aug 2008 10:46:26 -0700 Subject: Problem stsetch SNF 2008-08-12 10:46:26: Chamber isolation valve leaks Message-ID: New part should be in by Thursday. System is OK to run. From ericp at snf.stanford.edu Tue Aug 12 20:10:58 2008 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Tue, 12 Aug 2008 20:10:58 -0700 Subject: Comment stsetch SNF 2008-08-12 20:10:57: until the o-ring is changed.... Message-ID: I recommend that you keep the LL under vacuum by loading a phantom wafer (IE: pretending to load one) after you are done. This will at least start with the LL under full vacuum. Once you disable, it will leak up slowly. The leak is causing the turbo to go to high load and heat, which is not good for it. Since replacement is serveral tens of $k, it's worthwhile to not abuse it. Next user can begin by unloading the phantom wafer and then venting. From latta at snf.stanford.edu Fri Aug 15 11:52:28 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 15 Aug 2008 11:52:28 -0700 Subject: Comment stsetch SNF 2008-08-15 11:52:27: New Stand-by Procedure Message-ID: The recent problems with the chamber isolation valve leak has given us to opportunity to review our standard operating procedure with regard to the stand-by or idle mode. In the past we have left the loadlock vented. >From now on users of the tool should leave the loadlock under vacuum after completing their runs. This will help in decreasing wear and tear on the turbo pump. It also is consistent with the procedures at stsetch2. In order to leave the loadlock under vacuum after your work is completed you will need to load a 'fake' or 'phantom' wafer. You simply click on the LOAD button. The software will falsely indicate a wafer is on the chuck. When you approach the etcher to begin etching you will need to UNLOAD this fake wafer and VENT the loadlock. From latta at snf.stanford.edu Fri Aug 15 11:53:12 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 15 Aug 2008 11:53:12 -0700 Subject: Comment stsetch SNF 2008-08-12 20:10:57: until the o-ring is changed.... Message-ID: This is now standard operating procedure From latta at snf.stanford.edu Fri Aug 15 11:53:35 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 15 Aug 2008 11:53:35 -0700 Subject: Comment stsetch SNF 2008-05-23 15:07:38: Ran O2CLEAN Message-ID: archived From latta at snf.stanford.edu Fri Aug 15 11:53:55 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 15 Aug 2008 11:53:55 -0700 Subject: Comment stsetch SNF 2008-06-25 15:08:23: He flow low- 0.25sccm during etch Message-ID: guess it's not a problem From ktorashima at snf.stanford.edu Sat Aug 16 08:18:10 2008 From: ktorashima at snf.stanford.edu (ktorashima at snf.stanford.edu) Date: Sat, 16 Aug 2008 08:18:10 -0700 Subject: Shutdown stsetch SNF 2008-08-16 08:18:10: wafer broken in the chamber Message-ID: Our wafer was broken in the chamber From cbaxter at snf.stanford.edu Sat Aug 16 09:16:12 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 16 Aug 2008 09:16:12 -0700 Subject: Shutdown stsetch SNF 2008-08-16 08:18:10: wafer broken in the chamber Message-ID: Removed broken wafer and ran o2 clean.. From mtan at snf.stanford.edu Tue Aug 19 11:52:29 2008 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Tue, 19 Aug 2008 11:52:29 -0700 Subject: Problem stsetch SNF 2008-08-19 11:52:29: over pressure and out of range C4F8 flow Message-ID: During my several attempts in trying to run the deep recipe, the machine reported either an over pressure error or an out of range C4F8 flow error. I tried loading at least 5 times both with and without the mask holders, and none of them seems to work. From eenriquez at snf.stanford.edu Tue Aug 19 15:27:21 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 19 Aug 2008 15:27:21 -0700 Subject: Comment stsetch SNF 2008-08-19 15:27:21: Update Message-ID: Possible liquid in the C4F8 line. Pumped down the line to the gas cylinder for 1 hour. Ran the Deep recipe for 30 minutes without any problem. Need to monitor C4F8 flow. If still unstable, we will pump the gas line more thoroughly. From mtan at snf.stanford.edu Tue Aug 19 18:40:56 2008 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Tue, 19 Aug 2008 18:40:56 -0700 Subject: Problem stsetch SNF 2008-08-19 18:40:55: excessive pump down time alarm Message-ID: From mtan at snf.stanford.edu Tue Aug 19 18:50:33 2008 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Tue, 19 Aug 2008 18:50:33 -0700 Subject: Problem stsetch SNF 2008-08-19 18:50:33: loading: excessive pump down time Message-ID: Cannot load wafers. The system stays forever at pumping down the chamber. From cbaxter at snf.stanford.edu Tue Aug 19 21:01:42 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 19 Aug 2008 21:01:42 -0700 Subject: Problem stsetch SNF 2008-08-19 18:40:55: excessive pump down time alarm Message-ID: The load lock pump was low on white oil and leaking oil on the filter housing drain port. I added oil to halfway full and put a plug on the filter drain port. From cbaxter at snf.stanford.edu Tue Aug 19 21:01:49 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 19 Aug 2008 21:01:49 -0700 Subject: Problem stsetch SNF 2008-08-19 18:50:33: loading: excessive pump down time Message-ID: From eenriquez at snf.stanford.edu Wed Aug 20 09:35:47 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 20 Aug 2008 09:35:47 -0700 Subject: Shutdown stsetch SNF 2008-08-20 09:35:46: Pumping out C4F8 line Message-ID: C4F8 gas flow is unstable. From eenriquez at snf.stanford.edu Wed Aug 20 16:04:08 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 20 Aug 2008 16:04:08 -0700 Subject: Shutdown stsetch SNF 2008-08-20 09:35:46: Pumping out C4F8 line Message-ID: Pumped the C4F8 gas line to the cylinder. Ran the Deep recipe with no problems. From eenriquez at snf.stanford.edu Wed Aug 20 16:04:30 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 20 Aug 2008 16:04:30 -0700 Subject: Comment stsetch SNF 2008-08-19 15:27:21: Update Message-ID: Archived From eenriquez at snf.stanford.edu Thu Aug 21 07:07:24 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 21 Aug 2008 07:07:24 -0700 Subject: Problem stsetch SNF 2008-08-19 11:52:29: over pressure and out of range C4F8 flow Message-ID: Over pressure was due to liquid in the C4F8 gas line. Pumped down the gas line all the way to the cylinder on 8/20. From eenriquez at snf.stanford.edu Thu Aug 21 07:15:20 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 21 Aug 2008 07:15:20 -0700 Subject: Comment stsetch SNF 2008-08-21 07:15:19: Update on isolation valve leak Message-ID: We have the part to repair the leak. The repair will take several days because it involves disconnecting the chamber from the loadlock assembly. We are currently trying to decide on the timing of the repair. From alshehaj at snf.stanford.edu Fri Aug 29 15:34:58 2008 From: alshehaj at snf.stanford.edu (alshehaj at snf.stanford.edu) Date: Fri, 29 Aug 2008 15:34:58 -0700 Subject: Shutdown stsetch SNF 2008-08-29 15:34:58: Pump-out Time exceeded Message-ID: The loading chamber was closed with a napkin partially blocking the seal. I aborted loading the wafer and removed it. I kept getting this error message "Pump-out Time exceeded." The "Load" option is not active.