Shutdown stsetch SNF 2008-12-13 06:31:03: unable to load wafer
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Mon Dec 15 11:43:03 PST 2008
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Shutdown stsetch SNF 2008-12-13 06:31:03: unable to load wafer
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Comment stsetch SNF 2008-12-13 09:58:51: Turbo pump
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Replaced the turbo pump. Ran O2 clean.
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Shutdown stsetch SNF 2008-12-13 06:31:03: unable to load wafer
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Comment stsetch SNF 2008-12-13 09:58:51: Turbo pump
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