Shutdown stsetch SNF 2008-12-16 00:30:37: bad wafer load

damodei at snf.stanford.edu damodei at snf.stanford.edu
Tue Dec 16 00:30:37 PST 2008

Previous message: Comment stsetch SNF 2008-12-15 20:05:57: loading problem
Next message: Shutdown stsetch SNF 2008-12-16 00:30:37: bad wafer load
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Wafer & holder trapped in etch chamber.

Previous message: Comment stsetch SNF 2008-12-15 20:05:57: loading problem
Next message: Shutdown stsetch SNF 2008-12-16 00:30:37: bad wafer load
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the stsetch-pcs mailing list