Shutdown stsetch SNF 2008-12-16 00:30:37: bad wafer load

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Dec 16 08:39:05 PST 2008


Found 2 of the top half of the carrier inside the chamber along with the user's wafer.  Recovered the wafer and carrier.  Also ran an O2 clean.




More information about the stsetch-pcs mailing list