Shutdown stsetch SNF 2008-12-16 00:30:37: bad wafer load
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Tue Dec 16 08:39:05 PST 2008
Found 2 of the top half of the carrier inside the chamber along with the user's wafer. Recovered the wafer and carrier. Also ran an O2 clean.
More information about the stsetch-pcs
mailing list