Comment stsetch SNF 2008-12-15 20:05:57: loading problem

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Dec 16 08:39:14 PST 2008


Found 2 of the top half of the carrier inside the chamber along with the user's wafer.  Recovered the wafer and carrier.  Also ran an O2 clean.




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