Problem stsetch SNF 2008-02-21 21:33:44: C4F8 flow out of tolerance

ericp at snf.stanford.edu ericp at snf.stanford.edu
Thu Feb 21 21:33:44 PST 2008


Once during a half hour process, I received a C4F8 flow 
out of tolerance error.  Again (see my previous message), 
if we try to control few micron-sized features, this kills 
the profile!  Another SOI wafer burned by a failing machine. 
In a switched etch process, we cannot afford drop-outs like 
this. 




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