Problem stsetch SNF 2008-02-21 23:15:50: C4F8 failure, update.

ericp at snf.stanford.edu ericp at snf.stanford.edu
Thu Feb 21 23:15:51 PST 2008


Did it again on a second wafer, approx 10 min into a half hour etch. 
That's enough $300 bills burned in this machine for today. 




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