Problem stsetch SNF 2008-02-26 20:10:27: C4F8, continued failures

ericp at snf.stanford.edu ericp at snf.stanford.edu
Tue Feb 26 20:10:28 PST 2008


The C4F8 only occasionally reaches setpoint. 
This, obviously, destroys wafers.  Can we please either fix this 
problem, or call field service? 
"continuing to monitor" a known problem is "continuing to destroy my wafers,"  on which we've blown a capped ($7000 not including wafers or time) month of processing.  




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