Problem stsetch SNF 2008-02-26 20:10:27: C4F8, continued failures

[ericp at snf.stanford.edu]

The C4F8 only occasionally reaches setpoint. 
This, obviously, destroys wafers.  Can we please either fix this 
problem, or call field service? 
"continuing to monitor" a known problem is "continuing to destroy my wafers,"  on which we've blown a capped ($7000 not including wafers or time) month of processing.