Problem stsetch SNF 2008-02-27 08:27:06: C4F8 doesn't reach set point and my dummy wafer is stuck inside
shwong at snf.stanford.edu
shwong at snf.stanford.edu
Wed Feb 27 08:27:06 PST 2008
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Comment stsetch SNF 2008-02-26 20:11:58: by the way...
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Shutdown stsetch SNF 2008-02-27 08:31:07: No C4F8 flow
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