Problem stsetch SNF 2008-01-06 12:32:07: no plasma, coil power tolerance error

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Jan 7 11:38:44 PST 2008


Adjusted the backside helium dump valve flow to accomodate the higher leak rate of the wafer carrier.  Now able to run with the carrier at the max He pressure set point of 9.84 Torr.
I set the pressure back to 9 Torr . Had no problem running a wafer with and without a carrier.




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