Problem stsetch SNF 2008-01-10 18:54:12: "Coil power out of tolerance " error

eenriquez at eenriquez at
Fri Jan 11 10:30:16 PST 2008

Ran wafer using the carrier with no problems.  The backside helium flow at 9 Torr is around 2.5 sccm.  The fault limit is > 4 sccm.  Also ran at the maximum pressure setting of 9.85 Torr.  The flow rate at the max press setting was 2.8 sccm.
The most likely cause of the coil out of tolerance fault was that the process broke through the wafer

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