Problem stsetch SNF 2008-01-12 18:23:18: plasma cut out, and He flow low?

ericp at snf.stanford.edu ericp at snf.stanford.edu
Sat Jan 12 18:23:19 PST 2008


In addition to the problem quickwin reports (plasma cut out)
I also notice that the He flow is substantially lower than usual (1 sccm versus normal of 2.5-3).  
The plasma cut out seems to occur when it switches to etch cycle, then plasma is out for varying times, then restrikes. 
Obviously when the plasma cuts out on a switched process, it wrecks the wafer!




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