From chen0622 at snf.stanford.edu  Mon Jul 14 17:24:13 2008
From: chen0622 at snf.stanford.edu (chen0622 at snf.stanford.edu)
Date: Mon, 14 Jul 2008 17:24:13 -0700
Subject: Problem stsetch SNF 2008-07-14 17:24:13: communication error
Message-ID: <mailman.1580.1357938654.25867.stsetch-pcs@snf.stanford.edu>

could not start the problem



From eenriquez at snf.stanford.edu  Tue Jul 15 09:25:20 2008
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 15 Jul 2008 09:25:20 -0700
Subject: Problem stsetch SNF 2008-07-14 17:24:13: communication error
Message-ID: <mailman.1581.1357938655.25867.stsetch-pcs@snf.stanford.edu>

Handler controller communication error.  Reset the controller and ran a wafer using the fast deep recipe.



From kwankyu at snf.stanford.edu  Wed Jul 23 00:57:29 2008
From: kwankyu at snf.stanford.edu (kwankyu at snf.stanford.edu)
Date: Wed, 23 Jul 2008 00:57:29 -0700
Subject: Problem stsetch SNF 2008-07-23 00:57:28: Repeating failure during venting. 
Message-ID: <mailman.1582.1357938655.25867.stsetch-pcs@snf.stanford.edu>

After processing, I unloaded wafer and start venting. 
STS gave me a error of "failure of venting". 
It looks like pump is not strong enough to vent air from loading chamber in given time. I tried venting 8 times and got my wafer back. Please take a look at it. 



From mdickey at snf.stanford.edu  Wed Jul 23 08:59:15 2008
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Wed, 23 Jul 2008 08:59:15 -0700
Subject: Shutdown stsetch SNF 2008-07-23 08:59:15: Oil change
Message-ID: <mailman.1583.1357938655.25867.stsetch-pcs@snf.stanford.edu>

Down for load lock pump oil change



From mdickey at snf.stanford.edu  Wed Jul 23 09:40:54 2008
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Wed, 23 Jul 2008 09:40:54 -0700
Subject: Shutdown stsetch SNF 2008-07-23 08:59:15: Oil change
Message-ID: <mailman.1584.1357938655.25867.stsetch-pcs@snf.stanford.edu>

Oil change completed



From mdickey at snf.stanford.edu  Wed Jul 23 09:58:21 2008
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Wed, 23 Jul 2008 09:58:21 -0700
Subject: Problem stsetch SNF 2008-07-23 00:57:28: Repeating failure during venting. 
Message-ID: <mailman.1585.1357938655.25867.stsetch-pcs@snf.stanford.edu>

Before and after oil change loaded and unloaded a wafer
and ran a recipe with no problems. Could not duplicate
reported error.