From pnataraj at snf.stanford.edu Tue Jun 3 18:06:25 2008 From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu) Date: Tue, 3 Jun 2008 18:06:25 -0700 Subject: Comment stsetch SNF 2008-06-03 18:06:24: wafer stuck in the chamber Message-ID: please dont use!! my wafer is slided off in the chamber, it won't let me uload it. Eric will try to help in the night. From pnataraj at snf.stanford.edu Tue Jun 3 18:06:45 2008 From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu) Date: Tue, 3 Jun 2008 18:06:45 -0700 Subject: Problem stsetch SNF 2008-06-03 18:06:45: wafer stuck in the chamber Message-ID: From cbaxter at snf.stanford.edu Tue Jun 3 20:38:35 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 3 Jun 2008 20:38:35 -0700 Subject: Problem stsetch SNF 2008-06-03 18:06:45: wafer stuck in the chamber Message-ID: Found the upper clamp ring for the wafer carrier was wedge between the wafer lifter and chuck, had to turned the cda off and manually move the lifter up to removed the clamp ring. The last user had two clamp ring installed on the wafer carrier one on the top and one on the bottom. From cbaxter at snf.stanford.edu Tue Jun 3 20:38:42 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 3 Jun 2008 20:38:42 -0700 Subject: Comment stsetch SNF 2008-06-03 18:06:24: wafer stuck in the chamber Message-ID: From pnataraj at snf.stanford.edu Thu Jun 5 08:55:14 2008 From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu) Date: Thu, 5 Jun 2008 08:55:14 -0700 Subject: Comment stsetch SNF 2008-06-05 08:55:13: it wont vent Message-ID: Tells me pump out time exceeded and it wont vent the load lock chamber. From ericp at snf.stanford.edu Fri Jun 6 22:24:10 2008 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Fri, 6 Jun 2008 22:24:10 -0700 Subject: Problem stsetch SNF 2008-06-06 22:24:09: LL cannot pump to base Message-ID: Keep getting timeout error when the LL pumps to base pressure. From cbaxter at snf.stanford.edu Sat Jun 7 09:51:26 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 7 Jun 2008 09:51:26 -0700 Subject: Comment stsetch SNF 2008-06-07 09:51:24: Intermitten l/l pump down error Message-ID: The l/l has a leak, if I move the load arm to a different position it would pumped down normal to crossover setpoint pressure, it looks like the o-ring on the arm drive shaft is leaking. We don't the same size o-ring the shop, need to get one from varian. From mislam at snf.stanford.edu Sat Jun 7 15:47:49 2008 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Sat, 7 Jun 2008 15:47:49 -0700 Subject: Problem stsetch SNF 2008-06-07 15:47:48: Wafer stuck in LL Message-ID: Won't vent. From gzxqfy at 163.com Sat Jun 7 20:36:55 2008 From: gzxqfy at 163.com (When quality is a requirement) Date: Sun, 8 Jun 2008 11:36:55 +0800 Subject: When quality is a requirement Message-ID: An HTML attachment was scrubbed... URL: From cbaxter at snf.stanford.edu Sun Jun 8 16:51:25 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 8 Jun 2008 16:51:25 -0700 Subject: Shutdown stsetch SNF 2008-06-08 16:51:24: cassette handler not communicating Message-ID: From eenriquez at snf.stanford.edu Mon Jun 9 10:49:25 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 9 Jun 2008 10:49:25 -0700 Subject: Shutdown stsetch SNF 2008-06-08 16:51:24: cassette handler not communicating Message-ID: Communication cable was unplugged. Plugged connector back in and reseted the system. From eenriquez at snf.stanford.edu Mon Jun 9 10:58:40 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 9 Jun 2008 10:58:40 -0700 Subject: Problem stsetch SNF 2008-06-07 15:47:48: Wafer stuck in LL Message-ID: Load lock only pumped down to ~119 mT. LL leak rate was 1 mT/min. Changed LL pump oil and emptied the demister. Ran the Deep recipe with no problems. Cycled (loaded - unloaded - vented) the loadlock 10 X with no problems. From eenriquez at snf.stanford.edu Mon Jun 9 10:58:54 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 9 Jun 2008 10:58:54 -0700 Subject: Comment stsetch SNF 2008-06-07 09:51:24: Intermitten l/l pump down error Message-ID: Load lock only pumped down to ~119 mT. LL leak rate was 1 mT/min. Changed LL pump oil and emptied the demister. Ran the Deep recipe with no problems. Cycled (loaded - unloaded - vented) the loadlock 10 X with no problems. From eenriquez at snf.stanford.edu Mon Jun 9 10:59:51 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 9 Jun 2008 10:59:51 -0700 Subject: Comment stsetch SNF 2008-06-05 08:55:13: it wont vent Message-ID: Load lock only pumped down to ~119 mT. LL leak rate was 1 mT/min. Changed LL pump oil and emptied the demister. Ran the Deep recipe with no problems. Cycled (loaded - unloaded - vented) the loadlock 10 X with no problems. From eenriquez at snf.stanford.edu Mon Jun 9 11:00:04 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 9 Jun 2008 11:00:04 -0700 Subject: Problem stsetch SNF 2008-06-06 22:24:09: LL cannot pump to base Message-ID: Load lock only pumped down to ~119 mT. LL leak rate was 1 mT/min. Changed LL pump oil and emptied the demister. Ran the Deep recipe with no problems. Cycled (loaded - unloaded - vented) the loadlock 10 X with no problems. From takuyan at snf.stanford.edu Tue Jun 10 13:17:16 2008 From: takuyan at snf.stanford.edu (takuyan at snf.stanford.edu) Date: Tue, 10 Jun 2008 13:17:16 -0700 Subject: Shutdown stsetch SNF 2008-06-10 13:17:14: broken wafer Message-ID: I have broken my wafer INSIDE the etching chamber. How should I clean up? From eenriquez at snf.stanford.edu Tue Jun 10 14:46:58 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 10 Jun 2008 14:46:58 -0700 Subject: Shutdown stsetch SNF 2008-06-10 13:17:14: broken wafer Message-ID: Removed broken wafer pieces and wet cleaned the platten. Now running an O2 plasma. User will unload the wafer after the clean. From nharjee at snf.stanford.edu Tue Jun 17 01:43:56 2008 From: nharjee at snf.stanford.edu (nharjee at snf.stanford.edu) Date: Tue, 17 Jun 2008 01:43:56 -0700 Subject: Problem stsetch SNF 2008-06-17 01:43:54: Coil power out of tolerance Message-ID: Repeatedly received alarm for coil power out of tolerance. Attempted two bare Si wafers and two recipes - O2CLEAN and SMOOSHAL. From quickwin at snf.stanford.edu Tue Jun 17 14:34:31 2008 From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu) Date: Tue, 17 Jun 2008 14:34:31 -0700 Subject: Problem stsetch SNF 2008-06-17 14:34:30: plasma does not turn on Message-ID: plasma does not turn on at all even though display indicates that the plasma is on. From quickwin at snf.stanford.edu Tue Jun 17 14:35:21 2008 From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu) Date: Tue, 17 Jun 2008 14:35:21 -0700 Subject: Shutdown stsetch SNF 2008-06-17 14:35:18: no plasma Message-ID: From cbaxter at snf.stanford.edu Tue Jun 17 20:40:26 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 17 Jun 2008 20:40:26 -0700 Subject: Comment stsetch SNF 2008-06-17 20:40:25: The combiner module is burned Message-ID: John, will check sts for a replacement module. From cbaxter at snf.stanford.edu Tue Jun 17 23:09:41 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 17 Jun 2008 23:09:41 -0700 Subject: Shutdown stsetch SNF 2008-06-17 14:35:18: no plasma Message-ID: Eric and I took the phase/mag detector from agilent donated sts and replace the bad phase/mag on the coil. Also, we found the phase controller adjusted to to above 400deg which may have cause the phase/mag to burn up. From cbaxter at snf.stanford.edu Tue Jun 17 23:09:47 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 17 Jun 2008 23:09:47 -0700 Subject: Problem stsetch SNF 2008-06-17 14:34:30: plasma does not turn on Message-ID: From cbaxter at snf.stanford.edu Tue Jun 17 23:11:08 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 17 Jun 2008 23:11:08 -0700 Subject: Problem stsetch SNF 2008-06-17 01:43:54: Coil power out of tolerance Message-ID: Suspect this may have been the phase/mag detector that we just replaced. From cbaxter at snf.stanford.edu Tue Jun 17 23:11:35 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 17 Jun 2008 23:11:35 -0700 Subject: Comment stsetch SNF 2008-06-17 20:40:25: The combiner module is burned Message-ID: Changed phase/mag detector. From latta at snf.stanford.edu Wed Jun 25 15:08:24 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 25 Jun 2008 15:08:24 -0700 Subject: Comment stsetch SNF 2008-06-25 15:08:23: He flow low- 0.25sccm during etch Message-ID: Not sure if it is a real problem....