Problem stsetch SNF 2008-06-03 18:06:45: wafer stuck in the chamber

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Tue Jun 3 20:38:35 PDT 2008


Found the upper clamp ring for the wafer carrier was wedge
between the wafer lifter and chuck, had to turned the cda off
and manually move the lifter up to removed the clamp ring.
The last user had two clamp ring installed on the wafer 
carrier one on the top and one on the bottom. 




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