Problem stsetch SNF 2008-06-07 15:47:48: Wafer stuck in LL

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Jun 9 10:58:40 PDT 2008


Load lock only pumped down to ~119 mT.  LL leak rate was 1 mT/min.  Changed LL pump oil and emptied the demister.
Ran the Deep recipe with no problems.  Cycled (loaded - unloaded - vented) the loadlock 10 X with no problems.




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