Comment stsetch SNF 2008-06-07 09:51:24: Intermitten l/l pump down error

eenriquez at eenriquez at
Mon Jun 9 10:58:54 PDT 2008

Load lock only pumped down to ~119 mT.  LL leak rate was 1 mT/min.  Changed LL pump oil and emptied the demister.
Ran the Deep recipe with no problems.  Cycled (loaded - unloaded - vented) the loadlock 10 X with no problems.

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