Shutdown stsetch SNF 2008-06-10 13:17:14: broken wafer

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Jun 10 14:46:58 PDT 2008


Removed broken wafer pieces and wet cleaned the platten.  Now running an O2 plasma.  User will unload the wafer after the clean.




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