Problem stsetch SNF 2008-06-17 01:43:54: Coil power out of tolerance

nharjee at snf.stanford.edu nharjee at snf.stanford.edu
Tue Jun 17 01:43:56 PDT 2008


Repeatedly received alarm for coil power out of tolerance. Attempted two bare Si wafers and two recipes - O2CLEAN and SMOOSHAL.




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