Comment stsetch SNF 2008-06-17 20:40:25: The combiner module is burned
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Tue Jun 17 23:11:35 PDT 2008
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Comment stsetch SNF 2008-06-17 20:40:25: The combiner module is burned
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Comment stsetch SNF 2008-06-25 15:08:23: He flow low- 0.25sccm during etch
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Changed phase/mag detector.
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Comment stsetch SNF 2008-06-17 20:40:25: The combiner module is burned
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Comment stsetch SNF 2008-06-25 15:08:23: He flow low- 0.25sccm during etch
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