June 2008 Archives by date

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Starting: Tue Jun 3 18:06:25 PDT 2008
Ending: Wed Jun 25 15:08:24 PDT 2008
Messages: 26

• Comment stsetch SNF 2008-06-03 18:06:24: wafer stuck in the chamber   pnataraj at snf.stanford.edu
• Problem stsetch SNF 2008-06-03 18:06:45: wafer stuck in the chamber   pnataraj at snf.stanford.edu
• Problem stsetch SNF 2008-06-03 18:06:45: wafer stuck in the chamber   cbaxter at snf.stanford.edu
• Comment stsetch SNF 2008-06-03 18:06:24: wafer stuck in the chamber   cbaxter at snf.stanford.edu
• Comment stsetch SNF 2008-06-05 08:55:13: it wont vent   pnataraj at snf.stanford.edu
• Problem stsetch SNF 2008-06-06 22:24:09: LL cannot pump to base   ericp at snf.stanford.edu
• Comment stsetch SNF 2008-06-07 09:51:24: Intermitten l/l pump down error   cbaxter at snf.stanford.edu
• Problem stsetch SNF 2008-06-07 15:47:48: Wafer stuck in LL   mislam at snf.stanford.edu
• When quality is a requirement   When quality is a requirement
• Shutdown stsetch SNF 2008-06-08 16:51:24: cassette handler not communicating   cbaxter at snf.stanford.edu
• Shutdown stsetch SNF 2008-06-08 16:51:24: cassette handler not communicating   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2008-06-07 15:47:48: Wafer stuck in LL   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2008-06-07 09:51:24: Intermitten l/l pump down error   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2008-06-05 08:55:13: it wont vent   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2008-06-06 22:24:09: LL cannot pump to base   eenriquez at snf.stanford.edu
• Shutdown stsetch SNF 2008-06-10 13:17:14: broken wafer   takuyan at snf.stanford.edu
• Shutdown stsetch SNF 2008-06-10 13:17:14: broken wafer   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2008-06-17 01:43:54: Coil power out of tolerance   nharjee at snf.stanford.edu
• Problem stsetch SNF 2008-06-17 14:34:30: plasma does not turn on   quickwin at snf.stanford.edu
• Shutdown stsetch SNF 2008-06-17 14:35:18: no plasma   quickwin at snf.stanford.edu
• Comment stsetch SNF 2008-06-17 20:40:25: The combiner module is burned   cbaxter at snf.stanford.edu
• Shutdown stsetch SNF 2008-06-17 14:35:18: no plasma   cbaxter at snf.stanford.edu
• Problem stsetch SNF 2008-06-17 14:34:30: plasma does not turn on   cbaxter at snf.stanford.edu
• Problem stsetch SNF 2008-06-17 01:43:54: Coil power out of tolerance   cbaxter at snf.stanford.edu
• Comment stsetch SNF 2008-06-17 20:40:25: The combiner module is burned   cbaxter at snf.stanford.edu
• Comment stsetch SNF 2008-06-25 15:08:23: He flow low- 0.25sccm during etch   latta at snf.stanford.edu

Last message date: Wed Jun 25 15:08:24 PDT 2008
Archived on: Fri Jan 11 13:11:20 PST 2013

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