From eenriquez at snf.stanford.edu Tue Mar 4 14:20:43 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 4 Mar 2008 14:20:43 -0800 Subject: Comment stsetch SNF 2008-03-04 14:20:43: Update Message-ID: Installed new low and high flow C4F8 MFCs. Ran both MFCs at full flow (85 sccm and 170 sccm) for 1 hour. Flows deviated less than 5%. Need to run process qual. From eenriquez at snf.stanford.edu Tue Mar 4 14:20:58 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 4 Mar 2008 14:20:58 -0800 Subject: Comment stsetch SNF 2008-02-27 19:05:15: Update Message-ID: Installed new low and high flow C4F8 MFCs. Ran both MFCs at full flow (85 sccm and 170 sccm) for 1 hour. Flows deviated less than 5%. Need to run process qual. From eenriquez at snf.stanford.edu Tue Mar 4 14:21:05 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 4 Mar 2008 14:21:05 -0800 Subject: Shutdown stsetch SNF 2008-02-27 08:31:07: No C4F8 flow Message-ID: Installed new low and high flow C4F8 MFCs. Ran both MFCs at full flow (85 sccm and 170 sccm) for 1 hour. Flows deviated less than 5%. Need to run process qual. From eenriquez at snf.stanford.edu Tue Mar 4 14:21:19 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 4 Mar 2008 14:21:19 -0800 Subject: Comment stsetch SNF 2008-02-28 09:32:45: Update Message-ID: Installed new low and high flow C4F8 MFCs. Ran both MFCs at full flow (85 sccm and 170 sccm) for 1 hour. Flows deviated less than 5%. Need to run process qual. From eenriquez at snf.stanford.edu Tue Mar 4 14:21:26 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 4 Mar 2008 14:21:26 -0800 Subject: Comment stsetch SNF 2008-02-28 14:48:21: Update Message-ID: Installed new low and high flow C4F8 MFCs. Ran both MFCs at full flow (85 sccm and 170 sccm) for 1 hour. Flows deviated less than 5%. Need to run process qual. From eenriquez at snf.stanford.edu Tue Mar 4 14:21:35 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 4 Mar 2008 14:21:35 -0800 Subject: Comment stsetch SNF 2008-02-29 14:31:05: Update Message-ID: Installed new low and high flow C4F8 MFCs. Ran both MFCs at full flow (85 sccm and 170 sccm) for 1 hour. Flows deviated less than 5%. Need to run process qual. From eenriquez at snf.stanford.edu Tue Mar 4 14:21:42 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 4 Mar 2008 14:21:42 -0800 Subject: Problem stsetch SNF 2008-02-21 21:33:44: C4F8 flow out of tolerance Message-ID: Installed new low and high flow C4F8 MFCs. Ran both MFCs at full flow (85 sccm and 170 sccm) for 1 hour. Flows deviated less than 5%. Need to run process qual. From eenriquez at snf.stanford.edu Tue Mar 4 14:21:52 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 4 Mar 2008 14:21:52 -0800 Subject: Problem stsetch SNF 2008-02-21 23:15:50: C4F8 failure, update. Message-ID: Installed new low and high flow C4F8 MFCs. Ran both MFCs at full flow (85 sccm and 170 sccm) for 1 hour. Flows deviated less than 5%. Need to run process qual. From eenriquez at snf.stanford.edu Tue Mar 4 14:22:00 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 4 Mar 2008 14:22:00 -0800 Subject: Comment stsetch SNF 2008-02-26 13:28:01: C4F8 update Message-ID: Installed new low and high flow C4F8 MFCs. Ran both MFCs at full flow (85 sccm and 170 sccm) for 1 hour. Flows deviated less than 5%. Need to run process qual. From eenriquez at snf.stanford.edu Tue Mar 4 14:22:07 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 4 Mar 2008 14:22:07 -0800 Subject: Comment stsetch SNF 2008-02-26 14:25:58: C4F8 Update Message-ID: Installed new low and high flow C4F8 MFCs. Ran both MFCs at full flow (85 sccm and 170 sccm) for 1 hour. Flows deviated less than 5%. Need to run process qual. From eenriquez at snf.stanford.edu Tue Mar 4 14:22:14 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 4 Mar 2008 14:22:14 -0800 Subject: Problem stsetch SNF 2008-02-26 20:10:27: C4F8, continued failures Message-ID: Installed new low and high flow C4F8 MFCs. Ran both MFCs at full flow (85 sccm and 170 sccm) for 1 hour. Flows deviated less than 5%. Need to run process qual. From eenriquez at snf.stanford.edu Tue Mar 4 14:22:25 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 4 Mar 2008 14:22:25 -0800 Subject: Comment stsetch SNF 2008-02-26 20:11:58: by the way... Message-ID: Installed new low and high flow C4F8 MFCs. Ran both MFCs at full flow (85 sccm and 170 sccm) for 1 hour. Flows deviated less than 5%. Need to run process qual. From latta at snf.stanford.edu Tue Mar 4 16:39:13 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 4 Mar 2008 16:39:13 -0800 Subject: Comment stsetch SNF 2008-03-04 14:20:43: Update Message-ID: Quals run. Posted in comments From latta at snf.stanford.edu Tue Mar 4 16:41:31 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 4 Mar 2008 16:41:31 -0800 Subject: Problem stsetch SNF 2008-02-27 08:27:06: C4F8 doesn't reach set point and my dummy wafer is stuck inside Message-ID: C4F8 mfc's replaced and run for an hour. Flows stabilzed. Deep recipe run to season chamber for 10 m ins. Qual run. Looks good. Results in comments. From latta at snf.stanford.edu Tue Mar 4 16:46:43 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 4 Mar 2008 16:46:43 -0800 Subject: Comment stsetch SNF 2008-03-04 16:46:42: Qual after C4F8 mfc's replaced Message-ID: DEEP 00:10:00 Si etchrate = 2.54um/min PR etchrate = 207A/min si:PR = 123:1 (selectivity) From latta at snf.stanford.edu Wed Mar 5 10:40:45 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 5 Mar 2008 10:40:45 -0800 Subject: Comment stsetch SNF 2008-01-28 21:56:56: coil power problem Message-ID: He interlock bypassed. From rostam at snf.stanford.edu Fri Mar 14 18:29:15 2008 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Fri, 14 Mar 2008 18:29:15 -0700 Subject: Problem stsetch SNF 2008-03-14 18:29:14: plasma didn't turn on, deep recipe, w/o holder Message-ID: From korgan at snf.stanford.edu Sat Mar 15 11:44:28 2008 From: korgan at snf.stanford.edu (korgan at snf.stanford.edu) Date: Sat, 15 Mar 2008 11:44:28 -0700 Subject: Problem stsetch SNF 2008-03-15 11:44:26: RF unit overheating - will not strike a plasma Message-ID: From xlqek at 222.122.60.196 Sat Mar 15 20:40:01 2008 From: xlqek at 222.122.60.196 (Lvuz) Date: Sun, 16 Mar 2008 11:40:01 +0800 Subject: Price reduction,cooperates together! 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From tomada at snf.stanford.edu Mon Mar 17 11:43:10 2008 From: tomada at snf.stanford.edu (tomada at snf.stanford.edu) Date: Mon, 17 Mar 2008 11:43:10 -0700 Subject: Comment stsetch SNF 2008-03-17 11:43:08: Quite whitish looking plasma Message-ID: Gas flow look ok, plasma ON no problem, but unusal whitish color From latta at snf.stanford.edu Thu Mar 20 09:23:58 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 20 Mar 2008 09:23:58 -0700 Subject: Problem stsetch SNF 2008-03-15 11:44:26: RF unit overheating - will not strike a plasma Message-ID: fluid added to chiller From latta at snf.stanford.edu Thu Mar 20 09:24:38 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 20 Mar 2008 09:24:38 -0700 Subject: Problem stsetch SNF 2008-03-14 18:29:14: plasma didn't turn on, deep recipe, w/o holder Message-ID: probably due to low fuild level in chiller- added. From latta at snf.stanford.edu Thu Mar 20 09:31:33 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 20 Mar 2008 09:31:33 -0700 Subject: Comment stsetch SNF 2008-03-17 08:40:11: Update Message-ID: no further problems seen. From latta at snf.stanford.edu Thu Mar 20 09:33:23 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 20 Mar 2008 09:33:23 -0700 Subject: Comment stsetch SNF 2008-03-17 11:43:08: Quite whitish looking plasma Message-ID: Not sure what is going on here. Ran DEEP recipe for 15 mins did not see the white plasma, ran O2CLEAN for an excessive amount of time (90 mins), then ran DEEP again for 15 mins- no white plasma. Asked Astrid to let me observe her next etch. From chughes at snf.stanford.edu Thu Mar 20 15:22:44 2008 From: chughes at snf.stanford.edu (chughes at snf.stanford.edu) Date: Thu, 20 Mar 2008 15:22:44 -0700 Subject: Shutdown stsetch SNF 2008-03-20 15:22:44: Loadlock pumpdown time exceeded Message-ID: When I loaded my wafer, the loadlock refused to pumpdown low enough in pressure to start my process.; there appear to be some adhesive on the o-ring. I got a "pump out time exceeded error", and there doesn't seem to be any way I can clear it. It may have to wait until tomorrow for Elmer. From mdickey at snf.stanford.edu Fri Mar 21 10:23:10 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 21 Mar 2008 10:23:10 -0700 Subject: Shutdown stsetch SNF 2008-03-20 15:22:44: Loadlock pumpdown time exceeded Message-ID: Removed debris from loadlock O ring. Need to cycle a wafer. From latta at snf.stanford.edu Fri Mar 21 11:27:29 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 21 Mar 2008 11:27:29 -0700 Subject: Shutdown stsetch SNF 2008-03-21 11:27:28: unable to get communications Message-ID: From latta at snf.stanford.edu Fri Mar 21 14:29:29 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 21 Mar 2008 14:29:29 -0700 Subject: Shutdown stsetch SNF 2008-03-21 11:27:28: unable to get communications Message-ID: Ericp to the rescue! Communications back. From mislam at snf.stanford.edu Sun Mar 23 20:05:52 2008 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Sun, 23 Mar 2008 20:05:52 -0700 Subject: Shutdown stsetch SNF 2008-03-23 20:05:51: Broken wafer in chamber Message-ID: Wafer ran ok, broke while unloading. broken pieces in chamber. From shott at snf.stanford.edu Tue Mar 25 14:56:22 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 25 Mar 2008 14:56:22 -0700 Subject: Shutdown stsetch SNF 2008-03-25 14:56:20: Computer failure .... Message-ID: Stsetch computer would not power up .... From shott at snf.stanford.edu Tue Mar 25 14:59:05 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 25 Mar 2008 14:59:05 -0700 Subject: Shutdown stsetch SNF 2008-03-25 14:56:20: Computer failure .... Message-ID: Turned out to be a power supply failure. Replaced the existing supply with a new 380W supply. In the process. we've also added one of the little ATX power supply testers that shorts pins 14 and 15 of the 20-pin connector to test whether the other supply voltages are OK. At this point, the computer is reporting a communication problem, but I understand that this is a known problem that other experts can resolve. Thanks, John From shott at snf.stanford.edu Tue Mar 25 15:30:41 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 25 Mar 2008 15:30:41 -0700 Subject: Problem stsetch SNF 2008-03-25 15:30:40: Communications to loader hung .... Message-ID: Following the power supply replacement, the communications to the loader (I think), is hung. Since I know nothing about this, Eric volunteered to take a look and see if he could resolve this. Please don't use this system until that is complete ... Thanks, John From shott at snf.stanford.edu Tue Mar 25 15:31:19 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 25 Mar 2008 15:31:19 -0700 Subject: Shutdown stsetch SNF 2008-03-23 20:05:51: Broken wafer in chamber Message-ID: I believe that Eric cleaned this up last evening. Thanks, John From rissman at snf.stanford.edu Tue Mar 25 16:52:32 2008 From: rissman at snf.stanford.edu (rissman at snf.stanford.edu) Date: Tue, 25 Mar 2008 16:52:32 -0700 Subject: Comment stsetch SNF 2008-03-25 16:52:31: communication problem Message-ID: There is a communication problem between the computer and the wafer handler. Eric P.'s instruction was to cycle power on the computer and wait up to 5 minutes. I tried ~12 times with no success. He will try again tonight. The system is in yellow in case he can get it going, but is not working at the moment. From shott at snf.stanford.edu Tue Mar 25 19:18:54 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 25 Mar 2008 19:18:54 -0700 Subject: Problem stsetch SNF 2008-03-25 15:30:40: Communications to loader hung .... Message-ID: Eric cleared the communications problems. Then found that CB1 on the back had either tripped or (more likely) been snagged on someone's coat. Finally, a full reset including turbo spin down and restart and things seem to be behaving properly. Eric is running oxygen cycle now. Thanks, John From shott at snf.stanford.edu Tue Mar 25 19:19:22 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 25 Mar 2008 19:19:22 -0700 Subject: Comment stsetch SNF 2008-03-25 16:52:31: communication problem Message-ID: Eric cleared this .... OK to process. John