Shutdown stsetch SNF 2008-02-27 08:31:07: No C4F8 flow

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Mar 4 14:21:05 PST 2008


Installed new low and high flow C4F8 MFCs.  Ran both MFCs at full flow (85 sccm and 170 sccm) for 1 hour.  Flows deviated less than 5%.  Need to run process qual.




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