Comment stsetch SNF 2008-02-26 13:28:01: C4F8 update

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Mar 4 14:22:00 PST 2008


Installed new low and high flow C4F8 MFCs.  Ran both MFCs at full flow (85 sccm and 170 sccm) for 1 hour.  Flows deviated less than 5%.  Need to run process qual.




More information about the stsetch-pcs mailing list