Problem stsetch SNF 2008-02-26 20:10:27: C4F8, continued failures
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Tue Mar 4 14:22:14 PST 2008
Installed new low and high flow C4F8 MFCs. Ran both MFCs at full flow (85 sccm and 170 sccm) for 1 hour. Flows deviated less than 5%. Need to run process qual.
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