Problem stsetch SNF 2008-02-26 20:10:27: C4F8, continued failures

eenriquez at eenriquez at
Tue Mar 4 14:22:14 PST 2008

Installed new low and high flow C4F8 MFCs.  Ran both MFCs at full flow (85 sccm and 170 sccm) for 1 hour.  Flows deviated less than 5%.  Need to run process qual.

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