Problem stsetch SNF 2008-02-27 08:27:06: C4F8 doesn't reach set point and my dummy wafer is stuck inside

latta at snf.stanford.edu latta at snf.stanford.edu
Tue Mar 4 16:41:31 PST 2008


C4F8 mfc's replaced and run for an hour.  Flows stabilzed.  Deep recipe run to season chamber for 10 m ins.  Qual run.  Looks good. Results in comments.




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