Comment stsetch SNF 2008-03-04 16:46:42: Qual after C4F8 mfc's replaced

latta at snf.stanford.edu latta at snf.stanford.edu
Tue Mar 4 16:46:43 PST 2008


DEEP  00:10:00
Si etchrate = 2.54um/min
PR etchrate = 207A/min
si:PR = 123:1  (selectivity)




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