Comment stsetch SNF 2008-01-28 21:56:56: coil power problem
latta at snf.stanford.edu
latta at snf.stanford.edu
Wed Mar 5 10:40:45 PST 2008
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Comment stsetch SNF 2008-03-04 16:46:42: Qual after C4F8 mfc's replaced
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Problem stsetch SNF 2008-03-14 18:29:14: plasma didn't turn on, deep recipe, w/o holder
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He interlock bypassed.
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Comment stsetch SNF 2008-03-04 16:46:42: Qual after C4F8 mfc's replaced
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Problem stsetch SNF 2008-03-14 18:29:14: plasma didn't turn on, deep recipe, w/o holder
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